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In situ QCM (a) and QMS (b) measurements of AB-type Ru ALD using the... | Download Scientific Diagram
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Resistivity vs thickness for c-axis single crystal Ru films deposited... | Download Scientific Diagram
X-ray diffraction scan of 50-nm Mn 3 Sn thin film with 2-nm-Ru seed... | Download Scientific Diagram
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XRD patterns of the Ru films on TaN (5 nm)/Si with different growth... | Download Scientific Diagram
Dependence of Ru film thickness and resistivity on the amount of ALD... | Download Scientific Diagram